ALIO Industries Large-Diameter Apache Thin Stage
Thin stage with ultra-large aperture equipped with a linear motor.
A super-thin rotating stage with a super-large aperture utilizing a linear motor. Leveraging its features, it is suitable for alignment and active viewing when combined with a monolithic XY stage. Recommended for fine adjustments of large wafers! Please be sure to watch the video.
- 企業：オーテックス
- 価格：Other
